AZ31表面混合碳源制备DLC薄膜的结构和性能

Structure and properties of DLC films deposited by mixed carbon on the surface of AZ31

  • 摘要: 为了提高镁合金的耐蚀性和耐磨性,扩大镁合金的应用,节能减排,保护环境,采用绿色环保的磁控溅射技术在AZ31表面制备了强保护性的DLC薄膜。采用X射线小角掠入射研究薄膜的物相结构,借助扫描电镜观察薄膜表面形貌、横截面形貌和腐蚀形貌,采用纳米压痕仪测试薄膜的力学性能,分别采用电化学工作站和摩擦磨损试验机研究薄膜的耐蚀性和耐磨性,膜基的结合性能采用划痕试验评估。结果表明,薄膜为无定形碳结构,随着活性气体流量的增加,薄膜结构由非晶向纳米晶转变。薄膜与基体结合良好,结合力19~25 N。薄膜表面具有弥散分布的不规则颗粒,且表面粗糙度受活性气体流量影响明显。薄膜厚度1.15~1.18 μm,活性气体流量对薄膜厚度影响很小。随着活性气体流量的增加,DLC薄膜的硬度和杨氏模量增大,其最大值分别为17.35 GPa和94 GPa;摩擦系数和磨损率降低,其最小值分别为0.103和6.45×10-10 mm3/(N·m)。活性乙炔流量5 mL/min时,薄膜的耐蚀性能最好,活性乙炔流量10 mL/min时,薄膜的耐磨性能最好。创新点: (1)在软基体上制备了结合强度较高的DLC薄膜。(2)采用复合碳源制备DLC薄膜,增加了真空室内等离子体密度,提高了薄膜的沉积速率。(3)采用非金属Si作为打底过渡层,提高了膜基结合性能。(4)研究了乙炔流量对薄膜结构和性能的影响。

     

    Abstract: To improve the corrosion resistance and wear resistance of magnesium alloys, expand the application of Mg alloy, save energy, reduce emissions and protect the environment, green and environmentally friendly magnetron sputtering technology was used to prepare a strong protective DLC film on the surface of AZ31. The phase structure of the film was studied by small-angle grazing incidence of X-ray, the surface morphology, cross-section morphology and corrosion morphology of the film were observed by scanning electron microscope, and bonding properties of film-to-substrate were tested by a nano-indenter. The electrochemical workstation, friction and wear tester were employed to investigate the corrosion resistance and wear resistance of the film, and the bonding performance was evaluated by scratch test. The results showed that the DLC film had an amorphous structure. With the increase of the active gas flow rate, the DLC film tended to change from amorphous to nanocrystalline. The film was well bonded to the substrate with a bonding force of 19~25 N. The surface of the DLC film had irregularly distributed particles, and the surface roughness was significantly affected by the flow of active gas. The thickness of the film was 1.15~1.18 μm, and the active gas flow appeared little effect on the thickness. With the increase of the active gas flow rate, the hardness and Young’s modulus of the DLC film increased with the maximum values of 17.35 GPa and 94 GPa, respectively, and the friction coefficient and wear rate decreased with the minimum values of 0.103 and 6.45×10-10 mm3/(N·m), respectively. The corrosion resistance of the film was the best when the active acetylene flow rate was 5 mL/min, whereas the wear resistance was the best when the active acetylene flow rate was 10 mL/min.Highlights: (1) DLC films with high bonding strength were prepared on soft substrates.(2) Hybrid carbon source was used to prepare DLC films, which increased plasma density in vacuum chamber and deposition rate of films.(3) Nonmetallic Si was used as the substrate transition layer to improve the film-base bonding performance.(4) Effect of acetylene flow rate on structure and properties of films was studied.

     

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