Abstract: In order to acquire stable electron beam and enhance the quality of electron beam machine, the topology circuit of AC-DC-AC-DC-AC-DC and double closed loop control had been adopted to design high voltage power source, bias voltage power source and filament power source. The inverter power supply, 150 kV EB gun, vacuum system and others control system were integrated to establish a set of EB machine. Besides the high voltage and the maximum EB current output had been detected, the uniformity of welding parameters and the weld depth also had been measured. Through the series of tests, the results show that not only the inverter power source has a good linearity of high voltage output, but also the maximum beam output is up to 200 mA. The welding depth of titanium alloy is up to 100 mm. The welding tests show that the EB machine has excellent welding applicability.