Abstract: Multilayer single channel finite element coupled thermal-mechanical modeling method based on isosceles trapezoidal cross section was proposed. Firstly, a multi-layer single-channel trapezoidal function model was built on a single-layer single-channel isosceles trapezoidal function model. Then, rationality of multi-layer single-channel trapezoidal function model was verified by comparing geometric deviation and thermal performance indexes of multi-layer single-channel trapezoidal function model and parabolic function model, and thermal coupling simulation analysis and corresponding experimental verification of multi-layer single-channel deposition process were carried out. The simulation and test results showed that simulation results of multilayer single-channel trapezoidal function model were in good agreement with parabolic function model and test results, and computational efficiency was improved to a certain extent.